Nitrogen doping of MoSx thin films sputtered by reactive High Power Impulse Magnetron Sputtering
Tillmann, Wolfgang, Wittig, Alexandra, Moldenhauer, Henning, Thomann, Carl-Arne, Debus, Joerg, Aurich, Daniel, Bruemmer, AndreasJournal:
Thin Solid Films
DOI:
10.1016/j.tsf.2020.138267
Date:
August, 2020
File:
PDF, 24.45 MB
2020