Characteristics of a rotational windmill-shaped radio...

Vacuum 2020 / 11 Vol. 181

Characteristics of a rotational windmill-shaped radio frequency magnetron sputtering plasma for effective target utilization

Ohtsu, Yasunori, Nakashima, Takahiro, Tanaka, Rei, Schulze, Julian
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Volume:
181
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2020.109593
Date:
November, 2020
File:
PDF, 11.23 MB
2020
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