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Vacuum 2020 / 8

Smart gas dosage by a peristaltic pump for reactive RF sputtering of composition spread combinatorial hafnium-oxy-nitride layers

Sáfrán, György, Szász, Noémi, Dobrik, Gergely, Kalas, Benjámin, Serényi, Miklós
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Journal:
Vacuum
DOI:
10.1016/j.vacuum.2020.109675
Date:
August, 2020
File:
PDF, 857 KB
2020
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