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Engineering Efficient Acoustic Power Transfer in HBARs and Other Composite Resonators
Gokhale, Vikrant J., Downey, Brian P., Katzer, D. Scott, Hardy, Matthew T., Nepal, Neeraj, Meyer, David J.Year:
2020
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2020.3009516
File:
PDF, 1.89 MB
2020