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The IMOSFET: A Deeply-Scaled Fully-Self-Aligned Trench MOSFET
Sampath, Madankumar, Salemi, Arash, Morisette, Dallas, Cooper, James A.Volume:
1004
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.1004.751
Date:
July, 2020
File:
PDF, 3.03 MB
2020