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Structural and electrical properties of Ta2O5thin films prepared by photo-induced CVD
JUN LIU, AIXIANG WEI, XIANGHUI ZHAO, HAIYAN ZHANGVolume:
34
Language:
english
Pages:
4
DOI:
10.1007/s12034-011-0106-4
Date:
June, 2011
File:
PDF, 281 KB
english, 2011