Design and verification of a structure for isolating stress...

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Microsystem Technologies 2020 / 08

Design and verification of a structure for isolating stress in sandwich MEMS accelerometer

Mo, Yuming, Yang, Jie, Peng, Bo, Xie, Guofen, Tang, Bin
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Journal:
Microsystem Technologies
DOI:
10.1007/s00542-020-04980-w
Date:
August, 2020
File:
PDF, 2.82 MB
2020
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