Formation and desorption of nickel...

Formation and desorption of nickel hexafluoroacetylacetonate Ni(hfac) 2 on a nickel oxide surface in atomic layer etching processes

Basher, Abdulrahman H., Krstić, Marjan, Fink, Karin, Ito, Tomoko, Karahashi, Kazuhiro, Wenzel, Wolfgang, Hamaguchi, Satoshi
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Volume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/6.0000293
Date:
September, 2020
File:
PDF, 5.32 MB
2020
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