![](/img/cover-not-exists.png)
Formation and desorption of nickel hexafluoroacetylacetonate Ni(hfac) 2 on a nickel oxide surface in atomic layer etching processes
Basher, Abdulrahman H., KrstiÄ, Marjan, Fink, Karin, Ito, Tomoko, Karahashi, Kazuhiro, Wenzel, Wolfgang, Hamaguchi, SatoshiVolume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/6.0000293
Date:
September, 2020
File:
PDF, 5.32 MB
2020