The Mechanism of Layer Stacked Clamping (LSC) for Polishing...

Micromachines 2020 / 08 Vol. 11; Iss. 8

The Mechanism of Layer Stacked Clamping (LSC) for Polishing Ultra-Thin Sapphire Wafer

Chen, Zhixiang, Cao, Linlin, Yuan, Julong, Lyu, Binghai, Hang, Wei, Wang, Jiahuan
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Volume:
11
Journal:
Micromachines
DOI:
10.3390/mi11080759
Date:
August, 2020
File:
PDF, 5.18 MB
2020
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