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Review and Detail Classification of Stacking Faults in 4H-SiC Epitaxial Layer by Mirror Projection Electron Microscopy
Ohira, Kentaro, Isshiki, Toshiyuki, Sako, Hideki, Hasegawa, Masaki, Kobayashi, Kenji, Onuki, KatsunoriVolume:
1004
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.1004.314
Date:
July, 2020
File:
PDF, 1.97 MB
2020