Ion-Implanted Epitaxially Grown Gd2O3 on Silicon with...

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Journal of Electronic Materials 2020 / 08

Ion-Implanted Epitaxially Grown Gd2O3 on Silicon with Improved Electrical Properties

Joseph, A., Lilienkamp, G., Wietler, T. F., Osten, H. J.
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Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-020-08392-4
Date:
August, 2020
File:
PDF, 759 KB
2020
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