Investigation on the influence of the gas flow mode around...

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Vacuum 2020 / 8

Investigation on the influence of the gas flow mode around substrate on the deposition of diamond films in an overmoded MPCVD reactor chamber

Wang, B., Weng, J., Wang, Z.T., Wang, J.H., Liu, F., Xiong, L.W.
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Journal:
Vacuum
DOI:
10.1016/j.vacuum.2020.109659
Date:
August, 2020
File:
PDF, 1.01 MB
2020
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