Development and Study of the Properties of Impact-Resistant Ceramic Nanocomposite Coatings for Silicon
Bozhko, I. A., Kalashnikov, M. P., Fedorishcheva, M. V., Khristenko, Yu. F., Sergeev, V. P.Volume:
77
Journal:
Glass and Ceramics
DOI:
10.1007/s10717-020-00259-8
Date:
July, 2020
File:
PDF, 475 KB
2020