![](/img/cover-not-exists.png)
Effects of ultraviolet/ozone irradiation on glassy-like carbon film for the bioMEMS applications
Peng, Yong, Zhong, Fangshang, Qian, Linmao, Jiang, ShulanVolume:
533
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2020.147443
Date:
December, 2020
File:
PDF, 2.49 MB
2020