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[IEEE 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS) - Edinburgh, United Kingdom (2020.5.4-2020.5.18)] 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS) - Electrical and optical localisation of leakage current and breakdown point in SiOC:H low-k dielectrics
Vidal-Dho, Matthias, Hubert, Quentin, Gonon, Patrice, Pelissier, Bernard, Lentrein, Philippe, Ray, Patrice, Moragues, Jean-Michel, Fornara, PascalYear:
2020
DOI:
10.1109/icmts48187.2020.9107909
File:
PDF, 551 KB
2020