Design of a New XY Flexure Micropositioning Stage With a...

Actuators 2020 / 08 Vol. 9; Iss. 3

Design of a New XY Flexure Micropositioning Stage With a Large Hollow Platform

Zhang, Hanlun, Wu, Zehao, Xu, Qingsong
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Volume:
9
Journal:
Actuators
DOI:
10.3390/act9030065
Date:
August, 2020
File:
PDF, 1.61 MB
2020
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