Effect of metal coating and residual stress on the resonant frequency of MEMS resonators
Ashok Kumar Pandey, K. P. Venkatesh, Rudra PratapVolume:
34
Language:
english
Pages:
11
DOI:
10.1007/s12046-009-0029-6
Date:
August, 2009
File:
PDF, 301 KB
english, 2009