A novel MOEMS pressure sensor: Modelling and experimental...

Sadhana 2009 / 08 Vol. 34; Iss. 4

A novel MOEMS pressure sensor: Modelling and experimental evaluation

Patricia M. Nieva, Jim Kuo, Shiuh-Huah W. Chiang, Abdullah Syed
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Volume:
34
Language:
english
Pages:
9
DOI:
10.1007/s12046-009-0039-4
Date:
August, 2009
File:
PDF, 488 KB
english, 2009
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