Implantation of Silicon Ions into Sapphire: Low Doses

Semiconductors 2020 / 8 Vol. 54; Iss. 8

Implantation of Silicon Ions into Sapphire: Low Doses

Belova, N. E., Shemardov, S. G., Fanchenko, S. S., Golovkova, E. A., Kondratev, O. A.
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Volume:
54
Journal:
Semiconductors
DOI:
10.1134/S1063782620080060
Date:
August, 2020
File:
PDF, 654 KB
2020
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