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[IEEE 2020 IEEE International Reliability Physics Symposium (IRPS) - Dallas, TX, USA (2020.4.28-2020.5.30)] 2020 IEEE International Reliability Physics Symposium (IRPS) - NBTI Impact of Surface Orientation in Stacked Gate-All-Around Nanosheet Transistor
Zhou, Huimei, Wang, Miaomiao, Zhang, Jingyun, Watanabe, Koji, Durfee, Curtis, Mochizuki, Shogo, Bao, Ruqiang, Southwick, Richard, Bhuiyan, Maruf, Veeraraghavan, BaskerYear:
2020
DOI:
10.1109/irps45951.2020.9129023
File:
PDF, 305 KB
2020