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Simulated analysis of forming imperfection for micro shell resonators
Chen, Yimo, Xi, Xiang, Shi, Yan, Lu, Kun, Xiao, Dingbang, Wu, XuezhongJournal:
Microsystem Technologies
DOI:
10.1007/s00542-020-04995-3
Date:
August, 2020
File:
PDF, 2.96 MB
2020