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Study into grinding force in back grinding of wafer with outer rim
Zhu, Xiang-Long, Li, Yu, Dong, Zhi-Gang, Kang, Ren-Ke, Gao, ShangJournal:
Advances in Manufacturing
DOI:
10.1007/s40436-020-00316-z
Date:
August, 2020
File:
PDF, 1.42 MB
2020