Dielectric properties and reliability enhancement of atomic...

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  • Dielectric properties and reliability enhancement of atomic...

Dielectric properties and reliability enhancement of atomic layer deposited thin films by in situ atomic layer substrate biasing

Chou, Chun Yi, Chang, Teng-Jan, Wang, Chin-I, Wang, Chun-Yuan, Yin, Yu-Tung, Chung, Tsai-Fu, Yang, Jer-Ren, Lin, Hsin-Chih, Chen, Miin-Jang
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Year:
2020
Journal:
Journal of Materials Chemistry C
DOI:
10.1039/d0tc02346a
File:
PDF, 2.85 MB
2020
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