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A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films
Wang, Jialin, Park, Mingyo, Mertin, Stefan, Pensala, Tuomas, Ayazi, Farrokh, Ansari, AzadehYear:
2020
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2020.3014584
File:
PDF, 1.86 MB
2020