Monolithic Integration and Analysis of Vertical, Partially...

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Journal of Microelectromechanical Systems 2020

Monolithic Integration and Analysis of Vertical, Partially Encapsulated Nanoelectrode Arrays

Allani, Sonja, Jupe, Andreas, Staufer, Oskar, Seidl, Karsten, Vogt, Holger
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Year:
2020
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2020.3015836
File:
PDF, 5.68 MB
2020
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