Effect of Antenna-Substrate Distance on Quality of a-Si:H During ICP CVD Using a Flat Spiral Antenna
Karar, Partha, Kumar, Gourav, Wadibhasme, Nilesh, Patil, D. S., Dusane, Rajiv O.Year:
2020
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2020.3009865
File:
PDF, 2.87 MB
2020