Quantitative Investigation of Surface Charge Distribution and Point Probing Characteristics of Spherical Scattering Electrical Field Probe for Precision Measurement of Miniature Internal Structures with High Aspect Ratios
Bian, Xingyuan, Cui, Junning, Lu, Yesheng, Zhao, Yamin, Cheng, Zhongyi, Tan, JiubinVolume:
10
Journal:
Applied Sciences
DOI:
10.3390/app10155268
Date:
July, 2020
File:
PDF, 5.01 MB
2020