3D finite element analysis of corrugated silicon carbide...

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3D finite element analysis of corrugated silicon carbide membrane for ultrasonic MEMS microphone applications

Auliya, Rahmat Zaki, Ooi, Poh Choon, Mohd. Razip Wee, M. F., Mohammad Haniff, Muhammad Aniq Shazni, Zawawi, Siti Aisyah, Hamzah, Azrul Azlan
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Journal:
Microsystem Technologies
DOI:
10.1007/s00542-020-05006-1
Date:
August, 2020
File:
PDF, 1.50 MB
2020
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