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Thermal Transport and Frequency Response of Localized Modes on Low-Stress Nanomechanical Silicon Nitride Drums Featuring a Phononic-Band-Gap Structure
Sadeghi, Pedram, Tanzer, Manuel, Luhmann, Niklas, Piller, Markus, Chien, Miao-Hsuan, Schmid, SilvanVolume:
14
Journal:
Physical Review Applied
DOI:
10.1103/PhysRevApplied.14.024068
Date:
August, 2020
File:
PDF, 6.86 MB
2020