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p-type conductivity and damage recovery in implanted GaN annealed by rapid gyrotron microwave annealing
Meyers, V., Rocco, E., Anderson, T. J., Gallagher, J. C., Ebrish, M. A., Jones, K., Derenge, M., Shevelev, M., Sklyar, V., Hogan, K., McEwen, B., Shahedipour-Sandvik, F.Volume:
128
Journal:
Journal of Applied Physics
DOI:
10.1063/5.0016358
Date:
August, 2020
File:
PDF, 2.42 MB
2020