Influence of the Formation Temperature of the Morphology of...

Semiconductors 2020 / 8 Vol. 54; Iss. 8

Influence of the Formation Temperature of the Morphology of por-Si Formed by Pd-Assisted Chemical Etching

Silakov, G. O., Volovlikova, O. V., Gavrilov, S. A., Zheleznyakova, A. V., Dudin, A. A.
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Volume:
54
Journal:
Semiconductors
DOI:
10.1134/S1063782620080229
Date:
August, 2020
File:
PDF, 1.36 MB
2020
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