An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization
Andany, Santiago H, Hlawacek, Gregor, Hummel, Stefan, Brillard, Charlène, Kangül, Mustafa, Fantner, Georg EVolume:
11
Journal:
Beilstein Journal of Nanotechnology
DOI:
10.3762/bjnano.11.111
Date:
August, 2020
File:
PDF, 2.48 MB
2020