Optimized Substrate for Improved Performance of Stacked Nanosheet Field-Effect Transistor
Jegadheesan, V., Sivasankaran, K., Konar, AniruddhaYear:
2020
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2020.3017175
File:
PDF, 2.43 MB
2020