Effect of Precursor on the Dielectric Properties of...

Inorganic Materials 2020 / 08 Vol. 56; Iss. 8

Effect of Precursor on the Dielectric Properties of Diamond-Like Silicon–Carbon Films

Barinov, A. D., Gurinovich, T. D., Popov, A. I., Chukanova, T. S., Shapetina, M. A., Shupegin, M. L.
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Volume:
56
Journal:
Inorganic Materials
DOI:
10.1134/S0020168520080026
Date:
August, 2020
File:
PDF, 833 KB
2020
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