![](/img/cover-not-exists.png)
Nanoporous Silicon Thin Film based Hydrogen Sensor Using Metal-assisted Chemical Etching with Annealed Palladium Nanoparticles
Kim, Hyeonggyun, Yun, Jeonghoon, Gao, Min, Kim, Hyeok, Cho, Minkyu, Park, InkyuJournal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.0c10785
Date:
September, 2020
File:
PDF, 1.10 MB
2020