Al/Ti-film-resistor based thermal heater with Zig-Zag...

IOP Conference Series Materials Science and Engineering 2020 / 08 Vol. 892

Al/Ti-film-resistor based thermal heater with Zig-Zag configuration for MEMS application

Wang, Xinghua, Jiang, Zhijie, Qin, Jiangyi, Liu, Hongwei, Fan, Guangteng, Hu, Canbin
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Volume:
892
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/892/1/012063
Date:
August, 2020
File:
PDF, 596 KB
2020
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