Ultrathin Al Oxide Seed Layer for Atomic Layer Deposition of High- κ Al 2 O 3 Dielectrics on Graphene
Yang, Hang, Chen, Wei, Li, Ming-Yang, Xiong, Feng, Wang, Guang, Zhang, Sen, Deng, Chu-Yun, Peng, Gang, Qin, Shi-QiaoVolume:
37
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/37/7/076801
Date:
July, 2020
File:
PDF, 3.78 MB
2020