Closed-loop Range-Based Control of Dual-Stage...

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IEEE/ASME Transactions on Mechatronics 2020

Closed-loop Range-Based Control of Dual-Stage Nanopositioning Systems

Mitrovic, Aleksandra, Nagel, William Scott, Leang, Kam K., Clayton, Garrett M.
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Year:
2020
Journal:
IEEE/ASME Transactions on Mechatronics
DOI:
10.1109/TMECH.2020.3020047
File:
PDF, 8.41 MB
2020
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