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Design and Development of a Double-Bridge Micromirror With Bending and Twisting Cantilevers for Multiobject Spectroscopy
Kumar, Amit, Kumar, Prem, Bajpai, Anuroop, Rangra, Kamaljit, Bansal, DeepakYear:
2020
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2020.3016624
File:
PDF, 2.76 MB
2020