Interface State Reduction by Plasma-Enhanced ALD of...

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ACS Applied Materials & Interfaces 2020 / 08

Interface State Reduction by Plasma-Enhanced ALD of Homogeneous Ternary Oxides

Vitale, Steven A., Hu, Weilin, D'Onofrio, Richard, Soares, Tony, Geis, Michael
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Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.0c11882
Date:
August, 2020
File:
PDF, 579 KB
2020
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