Atmospheric He/O 2 plasma jet...

AIP Advances 2020 / 09 Vol. 10; Iss. 9

Atmospheric He/O 2 plasma jet fine etching with a scanning probe microscope

Nakazawa, Kenta, Yamamoto, Sho, Nakagawa, Ei, Ogino, Akihisa, Shimomura, Masaru, Iwata, Futoshi
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Volume:
10
Journal:
AIP Advances
DOI:
10.1063/5.0017952
Date:
September, 2020
File:
PDF, 3.76 MB
2020
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