Real-Time Plasma Uniformity Monitoring via Selective Plasma...

  • Main
  • 2020
  • Real-Time Plasma Uniformity Monitoring via Selective Plasma...

Real-Time Plasma Uniformity Monitoring via Selective Plasma Light Intensity Measurement Using Transparent-LCD-Module-Adapted Optical Emission Spectroscopy

Kim, In Joong, Park, Chuntaek, Shin, Dongseok, Yun, Ilgu
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2020
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2020.3017506
File:
PDF, 913 KB
2020
Conversion to is in progress
Conversion to is failed