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Real-Time Plasma Uniformity Monitoring via Selective Plasma Light Intensity Measurement Using Transparent-LCD-Module-Adapted Optical Emission Spectroscopy
Kim, In Joong, Park, Chuntaek, Shin, Dongseok, Yun, IlguYear:
2020
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2020.3017506
File:
PDF, 913 KB
2020