Modification of the Ratio between sp2- to sp3-Hybridized Carbon Components in PECVD Diamond-Like Films
Yunin, P. A., Okhapkin, A. I., Drozdov, M. N., Korolev, S. A., Arkhipova, E. A., Kraev, S. A., Drozdov, Yu. N., Shashkin, V. I., Radishev, D. B.Volume:
54
Journal:
Semiconductors
DOI:
10.1134/S1063782620090316
Date:
September, 2020
File:
PDF, 574 KB
2020