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Investigation for Low-rate Fenceless Al Etching Applied in Fabrication of Superconducting Circuits
Xu, Wanning, Wu, Yu, Jin, Hua, Ying, Liliang, Ren, Jie, Chen, Liyun, Shao, Yingyi, Li, Xiuting, Peng, Wei, Wang, ZhenYear:
2020
Journal:
IEEE Transactions on Applied Superconductivity
DOI:
10.1109/TASC.2020.3016682
File:
PDF, 1.16 MB
2020