Formation of Ohmic Contacts to a Diamond-Like Carbon Layer...

Semiconductors 2020 / 09 Vol. 54; Iss. 9

Formation of Ohmic Contacts to a Diamond-Like Carbon Layer Deposited on a Dielectric Diamond Substrate

Okhapkin, A. I., Yunin, P. A., Arkhipova, E. A., Kraev, S. A., Korolyov, S. A., Drozdov, M. N., Shashkin, V. I.
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Volume:
54
Journal:
Semiconductors
DOI:
10.1134/S1063782620090213
Date:
September, 2020
File:
PDF, 910 KB
2020
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