3C-SiC Bulk Growth: Effect of Growth Rate and Doping on...

Materials Science Forum 2020 / 7 Vol. 1004

3C-SiC Bulk Growth: Effect of Growth Rate and Doping on Defects and Stress

La Via, Francesco, Mauceri, Marco, Scuderi, Viviana, Calabretta, Cristiano, Zimbone, Massimo, Anzalone, Ruggero
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Volume:
1004
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.1004.120
Date:
July, 2020
File:
PDF, 485 KB
2020
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