MEMS Resonators for Frequency Reference and Timing...

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MEMS Resonators for Frequency Reference and Timing Applications

Wu, Guoqiang, Xu, Jinghui, Ng, Eldwin Jiaqiang, Chen, Wen
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Year:
2020
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2020.3020787
File:
PDF, 9.10 MB
2020
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