Evaluation of the mechanical properties of germanium-on-insulator (GeOI) films by Raman spectroscopy and nanoindentation
Mohammed, Y. S., Zhang, Kai, Heissler, S., Baumgart, H., Elmustafa, A. A.Volume:
128
Journal:
Journal of Applied Physics
DOI:
10.1063/5.0013454
Date:
August, 2020
File:
PDF, 1.97 MB
2020