Development of an integrated electrostatic precipitator and wet scrubber system for controlling NOx and particulate matter emissions from a semiconductor manufacturing process
Sung, Jin-Ho, Kim, Sumin, Kim, San, Han, Bangwoo, Kim, Yong-Jin, Kim, Hak-JoonYear:
2020
Journal:
IEEE Transactions on Industry Applications
DOI:
10.1109/TIA.2020.3023670
File:
PDF, 1.06 MB
2020