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Langmuir Probe Diagnostics of Inductively Coupled Plasma Generated Using Flat Spiral Antenna
Karar, Partha, Kumar, Gourav, Kar, Rajib, Kewlani, Hitesh M., Patil, D. S., Dusane, Rajiv O.Year:
2020
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2020.3020977
File:
PDF, 2.45 MB
2020